Integrated micro-electro-mechanical sensor development for inertial applications

Integration of Steering Angle Sensor with Global Positioning System and Micro-Electro-Mechanical Systems Inertial Measurement Unit for Vehicular Positioning

The concept of using the steering angle sensor to enhance positioning accuracy during Global Positioning System (GPS) outages is the focus of this article. This development of a GPS Micro-Electro-Mechanical Systems Inertial Measurement Unit (MEMS IMU) steering angle sensor vehicular positioning system is discussed in detail including the error dynamics and measurement models as well as integrat...

FEA in Micro - Electro - Mechanical Systems ( MEMS ) Applications : A Micromachined

Micro - Electro - Mechanical - Systems ( Mems )

A mechanical micro molecular mass sensor

One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains  determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...

A mechanical micro molecular mass sensor

One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains  determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...